Spectral polarization measurements by use of the grating division-of-amplitude photopolarimeter.

نویسندگان

  • Shankar Krishnan
  • Scott Hampton
  • James Rix
  • Brian Taylor
  • Rasheed M A Azzam
چکیده

The grating division-of-amplitude photopolarimeter (G-DOAP) is an instrument that exploits the multiple-beam-splitting, polarizing, and dispersive properties of diffraction gratings for the time-resolved measurement of the complete state of polarization of collimated broadband incident light, as represented by the four Stokes parameters as a function of wavelength across the spectrum. It is a compact, high-speed sensor that has no moving parts and is simple to install and operate. These characteristics make the G-DOAP well suited for in situ spectroscopic ellipsometry (SE) applications for monitoring and controlling thin-film processes. The design and performance of a prototype instrument are presented. Precise SE measurements, to +/-0.04 degrees in psi and +/-0.1 degrees in delta, are demonstrated in the 550-940-nm wavelength range.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Hybrid WDM and Optical Spectral Amplitude Coding with Array Waveguide Gratings over Fiber-to-the-Home Network

The hybrid wavelength-division multiplexing and optical code-division multiple-access scheme for EPON (called WDM/OCDMA-EPON) is presented over fiber-to-the-home (FTTH) network. In this study, each ONU (optical network unit) group is assigned the maximal-length sequence (M-sequence) code which is popularly used for spectral amplitude coding in OCDMA network. Hence, the proposed scheme is suitab...

متن کامل

Optical CDMA with Embedded Spectral-Polarization Coding over Double Balanced Differential-Detector

A spectral-polarization coding (SPC) optical code-division multipleaccess (OCDMA) configuration structured over arrayed-waveguide grating (AWG) router is proposed. The polarization-division double balanced detector is adopted to execute difference detection and enhances system performance. The signal-to-noise ratio (SNR) is derived by taking the effect of PIIN into account. The result indicates...

متن کامل

Performance optimization and light-beam-deviation analysis of the parallel-slab division-of-amplitude photopolarimeter.

A division-of-amplitude photopolarimeter that uses a parallel-slab multiple-reflection beam splitter was described recently [Opt. Lett. 21, 1709 (1996)]. We provide a general analysis and an optimization of a specific design that uses a fused-silica slab that is uniformly coated with a transparent thin film of ZnS on the front surface and with an opaque Ag or Au reflecting layer on the back. Mu...

متن کامل

Optimal beam splitters for the division-of-amplitude photopolarimeter.

Optimal optical parameters of the beam splitter that is used in the division-of-amplitude photopolarimeter are determined. These are (1) 50%-50% split ratio of the all-dielectric beam splitter, (2) differential phase shifts in reflection and transmission delta(r) and delta(t) that differ by +/- pi/2, and (3) ellipsometric parameters (psi(r), psi(t)) = (27.368 degrees, 62.632 degrees) or (62.632...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:
  • Applied optics

دوره 42 7  شماره 

صفحات  -

تاریخ انتشار 2003